F10400 - SEMI F104 - Test Method for Evaluation of Particle Contribution of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems StdPbc-0618 While the static leach-out testing

While the static leach-out testing is recommended to verify the quality of the resin normally used in the facility

チューブと融着継手の間のシールおよび融着継手と融着継手の間のシールについては，本文書の適用範囲内である。他の全ての装着シールは本文書の適用範囲外である。

This Standard intends host-instructed indexing of sites within a substrate and the loading/unloading of the substrates

maximum envelope dimensions

This edition was approved for publication by the global Audits and Reviews Subcommittee on February 2

F10400 - SEMI F104 - Test Method for Evaluation of Particle Contribution of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems StdPbc-0618 While the static leach-out testingThis Document provides specifications and test methods to evaluate and compare components for particle contribution into an ultrapure water (UPW) fluid stream. Two methods for evaluating particle contribution are provided. The rinse test method evaluates performance in a flushing mode while the component is in a static state (no actively moving components within the component under test). It provides an indication of the flush volume required to bring